Control of local stress in semiconductor silicon structures
Residual stress distribution in multilayer semiconductor structure is complicated and has a significant impact on device characteristics and yield, therefore their study is one of the actual tasks of modern device engineering. Purpose of the present work was to develop methods of estimation of actua...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2018-09-01
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| Series: | Pribory i Metody Izmerenij |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/390 |