Optical Phase Readout Instrument for Picometer-level Precision Heterodyne Interferometers

A laser interferometer typically combines a number of beams that travel different optical paths to determine factors such as lengths, surface irregularities or the index of refraction of materials. Heterodyne detection is a well-established method for sensing tiny optical pathlength displacements th...

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Bibliographic Details
Main Authors: J. J. Esteban Delgado, A. Andersen, I. Bykov, D. Coutinho
Format: Article
Language:English
Published: IFSA Publishing, S.L. 2020-12-01
Series:Sensors & Transducers
Subjects:
Online Access:https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3190.pdf