Optical Phase Readout Instrument for Picometer-level Precision Heterodyne Interferometers
A laser interferometer typically combines a number of beams that travel different optical paths to determine factors such as lengths, surface irregularities or the index of refraction of materials. Heterodyne detection is a well-established method for sensing tiny optical pathlength displacements th...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
IFSA Publishing, S.L.
2020-12-01
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Series: | Sensors & Transducers |
Subjects: | |
Online Access: | https://sensorsportal.com/HTML/DIGEST/december_2020/Vol_247/P_3190.pdf |