Películas amorfas de SixCyN depositadas mediante ECR-PECVD
ECR-PECVD processes with several activators and diluent gases were performed to obtain films with carbon and nitrogen at low temperatures. In all cases methane and nitrogen were used as precursors of C and N species. The characterization of the samples was done using Fourier transform infrared spect...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2000-08-01
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| Series: | Boletín de la Sociedad Española de Cerámica y Vidrio |
| Subjects: | |
| Online Access: | http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/797/825 |