Películas amorfas de SixCyN depositadas mediante ECR-PECVD

Películas amorfas de SixCyN depositadas mediante ECR-PECVD

ECR-PECVD processes with several activators and diluent gases were performed to obtain films with carbon and nitrogen at low temperatures. In all cases methane and nitrogen were used as precursors of C and N species. The characterization of the samples was done using Fourier transform infrared spect...

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Bibliographic Details
Main Authors:	Barbadillo, L., Hernández, M. J., Cervera, M., Piqueras, J.
Format:	Article
Language:	English
Published:	Elsevier 2000-08-01
Series:	Boletín de la Sociedad Española de Cerámica y Vidrio
Subjects:	SiCN ECR-PECVD OES FTIR spectroscopic ellipsometry elipsometría espectroscópica
Online Access:	http://ceramicayvidrio.revistas.csic.es/index.php/ceramicayvidrio/article/view/797/825

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