Investigations of Nanoscale Columnar Al<sub>x</sub>Ga<sub>1-x</sub>N/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface

Investigations of Nanoscale Columnar Al<sub>x</sub>Ga<sub>1-x</sub>N/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface

The growth of nanoscale columnar Al<sub>x</sub>Ga<sub>1-x</sub>N/AlN heterostructures on the surface of silicon substrates using plasma-activated nitrogen molecular-beam epitaxy was investigated in this work. Silicon substrates include atomic-smooth cSi substrate, Si substrat...

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Bibliographic Details
Main Authors: Pavel Vladimirovich Seredin, Nikolay Kurilo, Dmitry L. Goloshchapov, Vladimir Kashkarov, Aleksandr S. Lenshin, Nikita Buylov, Dmitry Nesterov, Andrey Mizerov, Sergey A. Kukushkin, S. Timoshnev, K. Yu. Shubina, M. S. Sobolev
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Photonics
Subjects:
Al<sub>x</sub>Ga<sub>1-x</sub>N
nanoscale columnar
GaN
SiC
porSi
MBE PA
Online Access:https://www.mdpi.com/2304-6732/10/11/1209

Internet

https://www.mdpi.com/2304-6732/10/11/1209

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