Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope
A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small co...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2013-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/13/8/10550 |