Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope
A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small co...
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| Format: | Article |
| Language: | English |
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MDPI AG
2013-08-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/13/8/10550 |
| _version_ | 1798035317650882560 |
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| author | Fuhua Yang Guowei Han Chaowei Si Jin Ning |
| author_facet | Fuhua Yang Guowei Han Chaowei Si Jin Ning |
| author_sort | Fuhua Yang |
| collection | DOAJ |
| description | A new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small coupling stiffness is proposed, which helps achieve a narrow bandwidth and a high amplification factor for a 2-DOF vibration system. A multi-DOF gyroscope with the proposed weak spring system is designed, and simulations indicate that when the operating frequency is set at 12.59 kHz, the flat frequency response region of the sense mode can be designed as narrow as 80 Hz, and the amplification factor of the sense mode at the operating frequency is up to 91, which not only protects the amplification factor from instability against process and temperature variations, but also sacrifices less performance. An experiment is also carried out to demonstrate the validity of the design. The multi-DOF gyroscope with the proposed weak coupling spring system is capable of achieving a good tradeoff between robustness and the performance. |
| first_indexed | 2024-04-11T20:56:33Z |
| format | Article |
| id | doaj.art-751175b719fb47ff8de6289f053df6df |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T20:56:33Z |
| publishDate | 2013-08-01 |
| publisher | MDPI AG |
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| series | Sensors |
| spelling | doaj.art-751175b719fb47ff8de6289f053df6df2022-12-22T04:03:40ZengMDPI AGSensors1424-82202013-08-01138105501056010.3390/s130810550Bandwidth Optimization Design of a Multi Degree of Freedom MEMS GyroscopeFuhua YangGuowei HanChaowei SiJin NingA new robust multi-degree of freedom (multi-DOF) MEMS gyroscope is presented in this paper. The designed gyroscope has its bandwidth and amplification factor of the sense mode adjusted more easily than the previous reported multi-DOF MEMS gyroscopes. Besides, a novel spring system with very small coupling stiffness is proposed, which helps achieve a narrow bandwidth and a high amplification factor for a 2-DOF vibration system. A multi-DOF gyroscope with the proposed weak spring system is designed, and simulations indicate that when the operating frequency is set at 12.59 kHz, the flat frequency response region of the sense mode can be designed as narrow as 80 Hz, and the amplification factor of the sense mode at the operating frequency is up to 91, which not only protects the amplification factor from instability against process and temperature variations, but also sacrifices less performance. An experiment is also carried out to demonstrate the validity of the design. The multi-DOF gyroscope with the proposed weak coupling spring system is capable of achieving a good tradeoff between robustness and the performance.http://www.mdpi.com/1424-8220/13/8/10550multi-DOF MEMS gyroscoperobustnessnarrow bandwidthlarge amplification factor |
| spellingShingle | Fuhua Yang Guowei Han Chaowei Si Jin Ning Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope Sensors multi-DOF MEMS gyroscope robustness narrow bandwidth large amplification factor |
| title | Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope |
| title_full | Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope |
| title_fullStr | Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope |
| title_full_unstemmed | Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope |
| title_short | Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope |
| title_sort | bandwidth optimization design of a multi degree of freedom mems gyroscope |
| topic | multi-DOF MEMS gyroscope robustness narrow bandwidth large amplification factor |
| url | http://www.mdpi.com/1424-8220/13/8/10550 |
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