High-Speed Temperature Control Method for MEMS Thermal Gravimetric Analyzer Based on Dual Fuzzy PID Control

High-Speed Temperature Control Method for MEMS Thermal Gravimetric Analyzer Based on Dual Fuzzy PID Control

The traditional thermal gravimetric analyzer (TGA) has a noticeable thermal lag effect, which restricts the heating rate, while the micro-electro-mechanical system thermal gravimetric analyzer (MEMS TGA) utilizes a resonant cantilever beam structure with high mass sensitivity, on-chip heating, and a...

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Bibliographic Details
Main Authors: Xiaoyang Zhang, Zhi Cao, Shanlai Wang, Lei Yao, Haitao Yu
Format: Article
Language:English
Published: MDPI AG 2023-04-01
Series:Micromachines
Subjects:
temperature control
thermal gravimetric analyzer
resonant cantilever
fuzzy control
PID control
MEMS TGA
Online Access:https://www.mdpi.com/2072-666X/14/5/929

Internet

https://www.mdpi.com/2072-666X/14/5/929

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