Progress and Prospect of Semiconductor Silicon Wafers in China

Silicon wafers are fundamental materials for semiconductors. China's semiconductor silicon wafers are highly dependent on foreign trade. Enhancing the independent guarantee capability of silicon wafers is significant for improving the overall level of China’s semiconductor industry. This study...

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Bibliographic Details
Main Authors: Zhang Guohu, Xiao Qinghua, Ma Fei
Format: Article
Language:zho
Published: 《中国工程科学》杂志社 2023-02-01
Series:中国工程科学
Subjects:
Online Access:http://www.engineering.org.cn/en/10.15302/J-SSCAE-2023.01.002