Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining
The use of three-dimensional (3D) microelectrodes to machine micro-cavities in electrochemical micromachining (ECMM) can greatly improve processing efficiency. The 3D microelectrodes that are difficult to fabricate by traditional methods can be prepared by laminated object manufacturing and vacuum t...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9098875/ |