Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining
The use of three-dimensional (3D) microelectrodes to machine micro-cavities in electrochemical micromachining (ECMM) can greatly improve processing efficiency. The 3D microelectrodes that are difficult to fabricate by traditional methods can be prepared by laminated object manufacturing and vacuum t...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2020-01-01
|
| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9098875/ |
| _version_ | 1818445567668256768 |
|---|---|
| author | Jianguo Lei Bin Xu Likuan Zhu |
| author_facet | Jianguo Lei Bin Xu Likuan Zhu |
| author_sort | Jianguo Lei |
| collection | DOAJ |
| description | The use of three-dimensional (3D) microelectrodes to machine micro-cavities in electrochemical micromachining (ECMM) can greatly improve processing efficiency. The 3D microelectrodes that are difficult to fabricate by traditional methods can be prepared by laminated object manufacturing and vacuum thermal diffusion bonding (VTDB). However, the VTDB process is very time-consuming, resulting in a long preparation cycle. To solve this problem, the present study proposed an approach combining wire electrochemical micromachining (WECMM) with micro-electric resistance slip welding to fabricate 3D microelectrodes. The machining surface quality and dimensional accuracy of 2D microstructures under different WECMM conditions were investigated. Moreover, the effects of the welding parameters on the bonding quality were studied. The experimental results show that with a 6 V machining voltage, 1.33 μm/s feed rate, and 30 μm movement amplitude for the wire electrode, the machining gap was approximately 10 μm and the machining surface was flat when using a tungsten wire 8 μm in diameter to machine 30 μm thick #304 stainless steel foils by WECMM. Under a 0.3 V welding voltage, 0.2 MPa welding pressure, 20 ms welding time and 160 times slip welding discharge, the error in 3D microelectrodes in lamination direction was smaller than 3 μm. Based on the proposed approach, two typical 3D microelectrodes were successfully fabricated and subsequently applied in ECMM to machine 3D micro-cavities in nickel plates. |
| first_indexed | 2024-12-14T19:33:53Z |
| format | Article |
| id | doaj.art-755e3b56018346e7a9bf48d7f6af333f |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-14T19:33:53Z |
| publishDate | 2020-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-755e3b56018346e7a9bf48d7f6af333f2022-12-21T22:49:59ZengIEEEIEEE Access2169-35362020-01-018970569706310.1109/ACCESS.2020.29966559098875Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical MicromachiningJianguo Lei0https://orcid.org/0000-0001-7799-7548Bin Xu1https://orcid.org/0000-0003-3937-0917Likuan Zhu2Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, ChinaGuangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, ChinaGuangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen, ChinaThe use of three-dimensional (3D) microelectrodes to machine micro-cavities in electrochemical micromachining (ECMM) can greatly improve processing efficiency. The 3D microelectrodes that are difficult to fabricate by traditional methods can be prepared by laminated object manufacturing and vacuum thermal diffusion bonding (VTDB). However, the VTDB process is very time-consuming, resulting in a long preparation cycle. To solve this problem, the present study proposed an approach combining wire electrochemical micromachining (WECMM) with micro-electric resistance slip welding to fabricate 3D microelectrodes. The machining surface quality and dimensional accuracy of 2D microstructures under different WECMM conditions were investigated. Moreover, the effects of the welding parameters on the bonding quality were studied. The experimental results show that with a 6 V machining voltage, 1.33 μm/s feed rate, and 30 μm movement amplitude for the wire electrode, the machining gap was approximately 10 μm and the machining surface was flat when using a tungsten wire 8 μm in diameter to machine 30 μm thick #304 stainless steel foils by WECMM. Under a 0.3 V welding voltage, 0.2 MPa welding pressure, 20 ms welding time and 160 times slip welding discharge, the error in 3D microelectrodes in lamination direction was smaller than 3 μm. Based on the proposed approach, two typical 3D microelectrodes were successfully fabricated and subsequently applied in ECMM to machine 3D micro-cavities in nickel plates.https://ieeexplore.ieee.org/document/9098875/3D microelectrodeelectrochemical micromachiningwelding3D micro-cavity |
| spellingShingle | Jianguo Lei Bin Xu Likuan Zhu Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining IEEE Access 3D microelectrode electrochemical micromachining welding 3D micro-cavity |
| title | Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining |
| title_full | Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining |
| title_fullStr | Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining |
| title_full_unstemmed | Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining |
| title_short | Experimental Study on the Fabrication of 3D Microelectrodes for Electrochemical Micromachining |
| title_sort | experimental study on the fabrication of 3d microelectrodes for electrochemical micromachining |
| topic | 3D microelectrode electrochemical micromachining welding 3D micro-cavity |
| url | https://ieeexplore.ieee.org/document/9098875/ |
| work_keys_str_mv | AT jianguolei experimentalstudyonthefabricationof3dmicroelectrodesforelectrochemicalmicromachining AT binxu experimentalstudyonthefabricationof3dmicroelectrodesforelectrochemicalmicromachining AT likuanzhu experimentalstudyonthefabricationof3dmicroelectrodesforelectrochemicalmicromachining |