A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

A Scale Factor Calibration Method for MEMS Resonant Accelerometers Based on Virtual Accelerations

This paper presents a scale factor calibration method based on virtual accelerations generated by electrostatic force. This method uses a series of voltage signals to simulate the inertial forces caused by the acceleration input, rather than frequent and laborious calibrations with high-precision in...

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Bibliographic Details
Main Authors: Zhaoyang Zhai, Xingyin Xiong, Liangbo Ma, Zheng Wang, Kunfeng Wang, Bowen Wang, Mingjiang Zhang, Xudong Zou
Format: Article
Language:English
Published: MDPI AG 2023-07-01
Series:Micromachines
Subjects:
accelerometer
calibration
virtual accelerations
comb-drive actuators
Online Access:https://www.mdpi.com/2072-666X/14/7/1408

Internet

https://www.mdpi.com/2072-666X/14/7/1408

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