System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers
Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2018-02-01
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| Series: | Engineering Science and Technology, an International Journal |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2215098617313216 |