System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers
Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2018-02-01
|
| Series: | Engineering Science and Technology, an International Journal |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2215098617313216 |
| _version_ | 1798044981433204736 |
|---|---|
| author | Felix Ströer Katharina Trinkaus Indek Raid Jörg Seewig |
| author_facet | Felix Ströer Katharina Trinkaus Indek Raid Jörg Seewig |
| author_sort | Felix Ströer |
| collection | DOAJ |
| description | Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective description of the stylus cantilever dynamics with system-theoretical techniques and show a simple iterative approach to optimize closed-loop control parameters with boundary conditions. |
| first_indexed | 2024-04-11T23:14:19Z |
| format | Article |
| id | doaj.art-75a4e4d7a76c4c29ac15cdefbf6fc72f |
| institution | Directory Open Access Journal |
| issn | 2215-0986 |
| language | English |
| last_indexed | 2024-04-11T23:14:19Z |
| publishDate | 2018-02-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Engineering Science and Technology, an International Journal |
| spelling | doaj.art-75a4e4d7a76c4c29ac15cdefbf6fc72f2022-12-22T03:57:42ZengElsevierEngineering Science and Technology, an International Journal2215-09862018-02-0121111712110.1016/j.jestch.2018.02.012System identification and control parameter optimization for a stylus profiler with exchangeable cantileversFelix StröerKatharina TrinkausIndek RaidJörg SeewigStylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object has to be accomplished in a controlled way in order to prevent damages to the specimen and the stylus cantilever. This is achieved by a closed-loop control. We present a method for the objective description of the stylus cantilever dynamics with system-theoretical techniques and show a simple iterative approach to optimize closed-loop control parameters with boundary conditions.http://www.sciencedirect.com/science/article/pii/S2215098617313216Stylus instrumentSystem identificationAutomated closed-loop controlOptimal closed-loop control parameters |
| spellingShingle | Felix Ströer Katharina Trinkaus Indek Raid Jörg Seewig System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers Engineering Science and Technology, an International Journal Stylus instrument System identification Automated closed-loop control Optimal closed-loop control parameters |
| title | System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers |
| title_full | System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers |
| title_fullStr | System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers |
| title_full_unstemmed | System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers |
| title_short | System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers |
| title_sort | system identification and control parameter optimization for a stylus profiler with exchangeable cantilevers |
| topic | Stylus instrument System identification Automated closed-loop control Optimal closed-loop control parameters |
| url | http://www.sciencedirect.com/science/article/pii/S2215098617313216 |
| work_keys_str_mv | AT felixstroer systemidentificationandcontrolparameteroptimizationforastylusprofilerwithexchangeablecantilevers AT katharinatrinkaus systemidentificationandcontrolparameteroptimizationforastylusprofilerwithexchangeablecantilevers AT indekraid systemidentificationandcontrolparameteroptimizationforastylusprofilerwithexchangeablecantilevers AT jorgseewig systemidentificationandcontrolparameteroptimizationforastylusprofilerwithexchangeablecantilevers |