A Sensitive and Versatile Thickness Determination Method Based on Non-Inflection Terahertz Property Fitting
The accuracy of thin-film characterization in terahertz spectroscopy is mainly set by the thickness uncertainty. Physical thickness measurement has limited accuracy for thin-film samples thinner than a few hundreds of micrometers and is sometimes even impossible. The temporal resolution of time-doma...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2019-09-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/19/19/4118 |