Feasibility study of single-crystal silicon ductile-regime turning via fast tool servo
Due to the material properties of single-crystal silicon, it is difficult to achieve high-efficiency processing in conventional turning. Fast tool servo (FTS) turning has emerged as a favorable technology for processing brittle materials. This paper investigates the tool radius, feed speed, and cutt...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2022-01-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785421015386 |