High-Speed Parallel Plasmonic Direct-Writing Nanolithography Using Metasurface-Based Plasmonic Lens

High-Speed Parallel Plasmonic Direct-Writing Nanolithography Using Metasurface-Based Plasmonic Lens

Simple and efficient nanofabrication technology with low cost and high flexibility is indispensable for fundamental nanoscale research and prototyping. Lithography in the near field using the surface plasmon polariton (i.e., plasmonic lithography) provides a promising solution. The system with high...

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Bibliographic Details
Main Authors: Yueqiang Hu, Ling Li, Rong Wang, Jian Song, Hongdong Wang, Huigao Duan, Jiaxin Ji, Yonggang Meng
Format: Article
Language:English
Published: Elsevier 2021-11-01
Series:Engineering
Subjects:
Nanofabrication
Surface plasmon polariton
Lithography
Plasmonic flying head
Plasmonic lens
Online Access:http://www.sciencedirect.com/science/article/pii/S2095809920303702

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http://www.sciencedirect.com/science/article/pii/S2095809920303702

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