FEM Simulation of a High-Performance 128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si Functional Substrate for Surface Acoustic Wave Gyroscopes

FEM Simulation of a High-Performance 128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si Functional Substrate for Surface Acoustic Wave Gyroscopes

To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si (LNOI) functional substrate were investigated with a three-dimensional finit...

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Bibliographic Details
Main Authors: Rui Ma, Weiguo Liu, Xueping Sun, Shun Zhou, Dabin Lin
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
surface acoustic wave gyroscope
128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si substrate
Rayleigh wave
gyroscopic effect
finite element simulation
Online Access:https://www.mdpi.com/2072-666X/13/2/202

Internet

https://www.mdpi.com/2072-666X/13/2/202

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