FEM Simulation of a High-Performance 128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si Functional Substrate for Surface Acoustic Wave Gyroscopes
To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO<sub>3</sub>/SiO<sub>2</sub>/Si (LNOI) functional substrate were investigated with a three-dimensional finit...
| প্রধান লেখক: | , , , , |
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| বিন্যাস: | প্রবন্ধ |
| ভাষা: | English |
| প্রকাশিত: |
MDPI AG
2022-01-01
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| মালা: | Micromachines |
| বিষয়গুলি: | |
| অনলাইন ব্যবহার করুন: | https://www.mdpi.com/2072-666X/13/2/202 |