Influence of Annealing on the Dielectric Properties of Zn-SiO<sub>2</sub>/Si Nanocomposites Obtained in “Hot” Implantation Conditions

Influence of Annealing on the Dielectric Properties of Zn-SiO<sub>2</sub>/Si Nanocomposites Obtained in “Hot” Implantation Conditions

This paper presents the results of AC electrical measurements of Zn-SiO<sub>2</sub>/Si nanocomposites obtained by ion implantation. Implantation of Zn ions was carried out into thermally oxidized p-type silicon substrates with energy of 150 keV and fluence of 7.5 × 10<sup>16</su...

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Bibliographic Details
Main Authors: Tomasz N. Kołtunowicz, Karolina Czarnacka, Piotr Gałaszkiewicz, Fadei F. Komarov, Maxim A. Makhavikou, Oleg V. Milchanin
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Nanomaterials
Subjects:
nanocomposite
ion implantation
impedance spectroscopy
charge transport
Online Access:https://www.mdpi.com/2079-4991/12/19/3449

Internet

https://www.mdpi.com/2079-4991/12/19/3449

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