Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets

Demonstration of Fully Integrable Long-Range Microposition Detection with Wafer-Level Embedded Micromagnets

A fully integrable magnetic microposition detection for miniaturized systems like MEMS devices is demonstrated. Whereas current magnetic solutions are based on the use of hybrid mounted magnets, here a combination of Hall sensors with a novel kind of wafer-level integrable micromagnet is presented....

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Bibliographic Details
Main Authors: Björn Gojdka, Daniel Cichon, Yannik Lembrecht, Mani Teja Bodduluri, Thomas Lisec, Markus Stahl-Offergeld, Hans-Peter Hohe, Florian Niekiel
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Micromachines
Subjects:
integrated position detection
micro positioning
MEMS
Hall sensor
micromagnets
Online Access:https://www.mdpi.com/2072-666X/13/2/235

Internet

https://www.mdpi.com/2072-666X/13/2/235

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