Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency
A new method is proposed to increase the resonant frequency of a Capacitive Micromachined Ultrasonic Transducer (CMUT) device while keeping the radii unchanged for devices fabricated by sacrificial release (SR) method. The resonant frequency of a CMUT cell is determined by the properties of the memb...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9785615/ |