Universal light-guiding geometry for on-chip resonators having extremely high Q-factor
High-Q resonators are used to enhance nonlinear phenomena in photonics, but developing a fabrication process to shape a new material into a resonator is challenging and costly. Here, the authors present a method using vapour deposition on pre-patterned substrates to fabricate resonators with any new...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2020-11-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-020-19799-2 |