Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping

Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping

A desorption-tailoring strategy is demonstrated to steadily prepare self-assembled p-AlGaN superlattices with sub-nanometer ultrathin barriers by MOCVD, which juggle the hole concentration and transport.

Bibliographic Details
Main Authors: Jiaming Wang, Mingxing Wang, Fujun Xu, Baiyin Liu, Jing Lang, Na Zhang, Xiangning Kang, Zhixin Qin, Xuelin Yang, Xinqiang Wang, Weikun Ge, Bo Shen
Format: Article
Language:English
Published: Nature Publishing Group 2022-03-01
Series:Light: Science & Applications
Online Access:https://doi.org/10.1038/s41377-022-00753-4

Internet

https://doi.org/10.1038/s41377-022-00753-4

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