Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping
A desorption-tailoring strategy is demonstrated to steadily prepare self-assembled p-AlGaN superlattices with sub-nanometer ultrathin barriers by MOCVD, which juggle the hole concentration and transport.
Bibliographic Details
| Main Authors: |
Jiaming Wang,
Mingxing Wang,
Fujun Xu,
Baiyin Liu,
Jing Lang,
Na Zhang,
Xiangning Kang,
Zhixin Qin,
Xuelin Yang,
Xinqiang Wang,
Weikun Ge,
Bo Shen |
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| Format: | Article
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| Language: | English |
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| Published: |
Nature Publishing Group
2022-03-01
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| Series: | Light: Science & Applications
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| Online Access: | https://doi.org/10.1038/s41377-022-00753-4
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