A new approach to increasing the sensitivity of a gas sensor based on nanocrystalline silicon carbide films
It was shown the possibility of increasing the sensitivity of a gas sensor based on nanocrystalline SiC films by using a scheme of a two-component sensing element, one of which is an n-nc-SiC film with electronic conductivity, and the second is an p-nc-SiC film with hole conductivity. It is shown th...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2021-12-01
|
| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/journalarchive/2021_5-6/2.pdf |