Probing the composition dependence of residual stress distribution in tungsten-titanium nanocrystalline thin films
Nanocrystalline thin films fabricated by deposition often have high residual stresses, making them susceptible to defects. Here, stress distribution in tungsten-titanium nanocrystalline films are probed by experimental and simulation techniques, revealing the impact of solute concentration on residu...
Main Authors: | , , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2023-02-01
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Series: | Communications Materials |
Online Access: | https://doi.org/10.1038/s43246-023-00339-6 |