Focus movement distance per pulse dependence of electrical conductivity and diameter of diamond internal modification induced by picosecond laser
Abstract Internal and local modifications via ultrashort pulsed laser illumination to diamond are promising for manufacturing diamond electronic devices. The relationship between the diameter/electrical conductivity of modified regions and the laser fluence distribution was investigated. Picosecond...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2022-10-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-022-21432-9 |