A Robust Infrared Transducer of an Ultra-Large-Scale Array

A robust micro-electro-mechanical systems (MEMS) infrared thin film transducer of an ultra-large-scale array was proposed and fabricated on a 4-inch silicon wafer. The silicon substrate and micro cavities were introduced. This novel transducer had excellent mechanical stability, time response, and s...

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Bibliographic Details
Main Authors: Defang Li, Jinying Zhang, Qingfeng Shi, Xichen Yuan, Zhuo Li, Xin Wang, Suhui Yang, Yan Hao
Format: Article
Language:English
Published: MDPI AG 2020-11-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/23/6807