Surface Texturing of Si with Periodically Arrayed Oblique Nanopillars to Achieve Antireflection
Si surfaces were texturized with periodically arrayed oblique nanopillars using slanted plasma etching, and their optical reflectance was measured. The weighted mean reflectance (<i>R<sub>w</sub></i>) of the nanopillar-arrayed Si substrate decreased monotonically with increas...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-01-01
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| Series: | Materials |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1944/14/2/380 |