Preparation of a Vertical Graphene-Based Pressure Sensor Using PECVD at a Low Temperature

Flexible pressure sensors have received much attention due to their widespread potential applications in electronic skins, health monitoring, and human–machine interfaces. Graphene and its derivatives hold great promise for two-dimensional sensing materials, owing to their superior properties, such...

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Bibliographic Details
Main Authors: Xin Cao, Kunpeng Zhang, Guang Feng, Quan Wang, Peihong Fu, Fengping Li
Format: Article
Language:English
Published: MDPI AG 2022-04-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/13/5/681