Preparation of a Vertical Graphene-Based Pressure Sensor Using PECVD at a Low Temperature
Flexible pressure sensors have received much attention due to their widespread potential applications in electronic skins, health monitoring, and human–machine interfaces. Graphene and its derivatives hold great promise for two-dimensional sensing materials, owing to their superior properties, such...
Main Authors: | Xin Cao, Kunpeng Zhang, Guang Feng, Quan Wang, Peihong Fu, Fengping Li |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-04-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/13/5/681 |
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