Oxygen precipitation in Ge-doped Czochralski-silicon at 900 °C investigated by in situ high energy x-ray diffraction

In this study, we compare the real-time oxygen (O) precipitation kinetics of heavily germanium (Ge)-doped Czochralski-silicon (Cz-Si) at 900 °C—under different pre-annealing conditions—with those of undoped Cz-Si. We follow in situ the evolution of the Bragg intensity in Laue transmission geometry a...

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Dettagli Bibliografici
Autori principali: Zhen Li, Johannes Will, Deren Yang
Natura: Articolo
Lingua:English
Pubblicazione: AIP Publishing LLC 2020-10-01
Serie:AIP Advances
Accesso online:http://dx.doi.org/10.1063/5.0027232