OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM

Pursuiting cutting efficiency and surface quality during machining monocrystalline silicon can improve the quality of the wafer itself and reduce the production cost. The second-order model of variable parameter voltage,pulse on time,pulse interval,wire saw speed and process result is established by...

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Bibliographic Details
Main Authors: CHEN YuLong, LI ShuJuan, BU WenHao, WANG XinYi
Format: Article
Language:zho
Published: Editorial Office of Journal of Mechanical Strength 2019-01-01
Series:Jixie qiangdu
Subjects:
Online Access:http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2019.01.017