OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM
Pursuiting cutting efficiency and surface quality during machining monocrystalline silicon can improve the quality of the wafer itself and reduce the production cost. The second-order model of variable parameter voltage,pulse on time,pulse interval,wire saw speed and process result is established by...
Main Authors: | , , , |
---|---|
Format: | Article |
Language: | zho |
Published: |
Editorial Office of Journal of Mechanical Strength
2019-01-01
|
Series: | Jixie qiangdu |
Subjects: | |
Online Access: | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2019.01.017 |
_version_ | 1826871667208486912 |
---|---|
author | CHEN YuLong LI ShuJuan BU WenHao WANG XinYi |
author_facet | CHEN YuLong LI ShuJuan BU WenHao WANG XinYi |
author_sort | CHEN YuLong |
collection | DOAJ |
description | Pursuiting cutting efficiency and surface quality during machining monocrystalline silicon can improve the quality of the wafer itself and reduce the production cost. The second-order model of variable parameter voltage,pulse on time,pulse interval,wire saw speed and process result is established by response surface method,The variance analysis shows that the model equation is significant. The improved non-dominated genetic algorithm( NSGA-II) is used to optimize processing process,and we can get a set of non-dominated solutions. These non-dominated solutions can satisfy the needs of engineering workers under different conditions. The corresponding experimental proving the non-dominated solution is feasible. |
first_indexed | 2024-03-12T20:44:11Z |
format | Article |
id | doaj.art-78e5ac63aa814d2581e0478c0b24d378 |
institution | Directory Open Access Journal |
issn | 1001-9669 |
language | zho |
last_indexed | 2025-02-16T23:44:13Z |
publishDate | 2019-01-01 |
publisher | Editorial Office of Journal of Mechanical Strength |
record_format | Article |
series | Jixie qiangdu |
spelling | doaj.art-78e5ac63aa814d2581e0478c0b24d3782025-01-15T02:30:34ZzhoEditorial Office of Journal of Mechanical StrengthJixie qiangdu1001-96692019-01-01419810330603742OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHMCHEN YuLongLI ShuJuanBU WenHaoWANG XinYiPursuiting cutting efficiency and surface quality during machining monocrystalline silicon can improve the quality of the wafer itself and reduce the production cost. The second-order model of variable parameter voltage,pulse on time,pulse interval,wire saw speed and process result is established by response surface method,The variance analysis shows that the model equation is significant. The improved non-dominated genetic algorithm( NSGA-II) is used to optimize processing process,and we can get a set of non-dominated solutions. These non-dominated solutions can satisfy the needs of engineering workers under different conditions. The corresponding experimental proving the non-dominated solution is feasible.http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2019.01.017Wire electrical discharge machiningMonocrystalline siliconResponse surface methodNSGA Ⅱ |
spellingShingle | CHEN YuLong LI ShuJuan BU WenHao WANG XinYi OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM Jixie qiangdu Wire electrical discharge machining Monocrystalline silicon Response surface method NSGA Ⅱ |
title | OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM |
title_full | OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM |
title_fullStr | OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM |
title_full_unstemmed | OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM |
title_short | OPTIMIZE PROCESS OF WEDM MONOCRYSTALLINE SILICON BASE ON RESPONSE SUEFACE METHOD AND IMPROVED NON-DOMINATED GENETIC ALGORITHM |
title_sort | optimize process of wedm monocrystalline silicon base on response sueface method and improved non dominated genetic algorithm |
topic | Wire electrical discharge machining Monocrystalline silicon Response surface method NSGA Ⅱ |
url | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2019.01.017 |
work_keys_str_mv | AT chenyulong optimizeprocessofwedmmonocrystallinesiliconbaseonresponsesuefacemethodandimprovednondominatedgeneticalgorithm AT lishujuan optimizeprocessofwedmmonocrystallinesiliconbaseonresponsesuefacemethodandimprovednondominatedgeneticalgorithm AT buwenhao optimizeprocessofwedmmonocrystallinesiliconbaseonresponsesuefacemethodandimprovednondominatedgeneticalgorithm AT wangxinyi optimizeprocessofwedmmonocrystallinesiliconbaseonresponsesuefacemethodandimprovednondominatedgeneticalgorithm |