Thermal Flow Meter with Integrated Thermal Conductivity Sensor

Thermal Flow Meter with Integrated Thermal Conductivity Sensor

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage...

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Bibliographic Details
Main Authors: Shirin Azadi Kenari, Remco J. Wiegerink, Henk-Willem Veltkamp, Remco G. P. Sanders, Joost C. Lötters
Format: Article
Language:English
Published: MDPI AG 2023-06-01
Series:Micromachines
Subjects:
thermal flow sensor
thermal conductivity
calorimetric sensor
Wheatstone bridge
Online Access:https://www.mdpi.com/2072-666X/14/7/1280

Internet

https://www.mdpi.com/2072-666X/14/7/1280

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