Thermal Flow Meter with Integrated Thermal Conductivity Sensor

Thermal Flow Meter with Integrated Thermal Conductivity Sensor

This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of identifying the gas type through a simple DC voltage...

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Bibliographic Details
Main Authors:	Shirin Azadi Kenari, Remco J. Wiegerink, Henk-Willem Veltkamp, Remco G. P. Sanders, Joost C. Lötters
Format:	Article
Language:	English
Published:	MDPI AG 2023-06-01
Series:	Micromachines
Subjects:	thermal flow sensor thermal conductivity calorimetric sensor Wheatstone bridge
Online Access:	https://www.mdpi.com/2072-666X/14/7/1280

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