Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement
In this paper, a fiber optic microprobe displacement sensor is proposed considering characteristics of micro-Michelson interference structure and its components. The principal error of micro Fabry–Perot interferometric structure is avoided, and high-precision interferometric displacement measurement...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/2/224 |