Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement
In this paper, a fiber optic microprobe displacement sensor is proposed considering characteristics of micro-Michelson interference structure and its components. The principal error of micro Fabry–Perot interferometric structure is avoided, and high-precision interferometric displacement measurement...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/15/2/224 |
| _version_ | 1797297477995462656 |
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| author | Yisi Dong Jinran Zhang Chen Zhang Haijin Fu Wenwen Li Wenrui Luo Pengcheng Hu |
| author_facet | Yisi Dong Jinran Zhang Chen Zhang Haijin Fu Wenwen Li Wenrui Luo Pengcheng Hu |
| author_sort | Yisi Dong |
| collection | DOAJ |
| description | In this paper, a fiber optic microprobe displacement sensor is proposed considering characteristics of micro-Michelson interference structure and its components. The principal error of micro Fabry–Perot interferometric structure is avoided, and high-precision interferometric displacement measurement is realized. The collimated microprobe and convergent microprobe are analyzed, simulated, and designed for the purposes of measuring long-distance displacement and small spot rough surface, respectively. The core parameters of the probes’ internal components are mapped to coupling efficiency and contrast of the sensor measurements, which provides a basis for the probes’ design. Finally, simulation and experimental testing of the two probes show that the collimated probe’s working distance and converging probe’s tolerance angle can reach 40 cm and ±0.5°, respectively. The designed probes are installed in the fiber laser interferometer, and a displacement resolution of 0.4 nm is achieved. |
| first_indexed | 2024-03-07T22:20:56Z |
| format | Article |
| id | doaj.art-791b62d640564bfca1b920b8408ea016 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:20:56Z |
| publishDate | 2024-01-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-791b62d640564bfca1b920b8408ea0162024-02-23T15:27:40ZengMDPI AGMicromachines2072-666X2024-01-0115222410.3390/mi15020224Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement MeasurementYisi Dong0Jinran Zhang1Chen Zhang2Haijin Fu3Wenwen Li4Wenrui Luo5Pengcheng Hu6Center of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaCenter of Ultra-Precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, ChinaIn this paper, a fiber optic microprobe displacement sensor is proposed considering characteristics of micro-Michelson interference structure and its components. The principal error of micro Fabry–Perot interferometric structure is avoided, and high-precision interferometric displacement measurement is realized. The collimated microprobe and convergent microprobe are analyzed, simulated, and designed for the purposes of measuring long-distance displacement and small spot rough surface, respectively. The core parameters of the probes’ internal components are mapped to coupling efficiency and contrast of the sensor measurements, which provides a basis for the probes’ design. Finally, simulation and experimental testing of the two probes show that the collimated probe’s working distance and converging probe’s tolerance angle can reach 40 cm and ±0.5°, respectively. The designed probes are installed in the fiber laser interferometer, and a displacement resolution of 0.4 nm is achieved.https://www.mdpi.com/2072-666X/15/2/224fiber laser interferometermicroprobe sensorsMichelson laser interference |
| spellingShingle | Yisi Dong Jinran Zhang Chen Zhang Haijin Fu Wenwen Li Wenrui Luo Pengcheng Hu Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement Micromachines fiber laser interferometer microprobe sensors Michelson laser interference |
| title | Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement |
| title_full | Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement |
| title_fullStr | Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement |
| title_full_unstemmed | Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement |
| title_short | Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement |
| title_sort | analysis and design of fiber microprobe displacement sensors including collimated type and convergent type for ultra precision displacement measurement |
| topic | fiber laser interferometer microprobe sensors Michelson laser interference |
| url | https://www.mdpi.com/2072-666X/15/2/224 |
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