Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement

Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement

In this paper, a fiber optic microprobe displacement sensor is proposed considering characteristics of micro-Michelson interference structure and its components. The principal error of micro Fabry–Perot interferometric structure is avoided, and high-precision interferometric displacement measurement...

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Bibliographic Details
Main Authors: Yisi Dong, Jinran Zhang, Chen Zhang, Haijin Fu, Wenwen Li, Wenrui Luo, Pengcheng Hu
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
fiber laser interferometer
microprobe sensors
Michelson laser interference
Online Access:https://www.mdpi.com/2072-666X/15/2/224

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