Design and Fabrication of Substrate-Free Au&#x002F;SiN<sub>x</sub>&#x002F;Au Metafilm for THz Sensing Application

Design and Fabrication of Substrate-Free Au&#x002F;SiN<sub>x</sub>&#x002F;Au Metafilm for THz Sensing Application

A method of designing and fabricating substrate-free Au&#x002F;SiN<sub>x</sub>&#x002F;Au metafilms as the terahertz (THz) absorber of metamaterial focal plane arrays (MFPA) is reported. The absorption was investigated by the finite integration method simulation and new explicit f...

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Bibliographic Details
Main Authors: Zhigang Li, Yi Ou, Jianyu Fu, Wenjing Jiang, Qing Zhao
Format: Article
Language:English
Published: IEEE 2022-01-01
Series:IEEE Photonics Journal
Subjects:
Au/SiN<named-content xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:ali="http://www.niso.org/schemas/ali/1.0/" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" content-type="math" xlink:type="simple"> <inline-formula> <tex-math notation="LaTeX">$_{x}$</tex-math> </inline-formula> </named-content>/Au metafilm
substrate-free
asymmetric peak model
THz sensing
Online Access:https://ieeexplore.ieee.org/document/9796544/

Internet

https://ieeexplore.ieee.org/document/9796544/

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