Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si<sub>3</sub>N<sub>4</sub>-SiO<sub>2</sub> Double-Covered Waveguiding Layer

Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si<sub>3</sub>N<sub>4</sub>-SiO<sub>2</sub> Double-Covered Waveguiding Layer

Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si<sub>3</sub>N<sub>4</sub>-SiO<sub>2</sub> double-covered layer was proposed for samples...

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Bibliographic Details
Main Authors: Luming Li, Mingyong Zhou, Lei Huang, Bingyan Jiang
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Micromachines
Subjects:
L-SAW
double-covered waveguiding layer
mass sensitivity
finite element method (FEM)
Online Access:https://www.mdpi.com/2072-666X/14/9/1696

Internet

https://www.mdpi.com/2072-666X/14/9/1696

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