Investigation on the Effective Measures for Improving the Performance of Calorimetric Microflow Sensor
The performance of the calorimetric microflow sensor is closely related to the thermal sensing part design, including structure parameter, heater temperature, and operation environment. In this paper, several measures to enhance the performance of the calorimetric microflow sensor were proposed and...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-08-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/23/17/7413 |