A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

A Novel Fabrication Method for a Capacitive MEMS Accelerometer Based on Glass–Silicon Composite Wafers

In this paper, we report a novel teeter-totter type accelerometer based on glass-silicon composite wafers. Unlike the ordinary micro-electro-mechanical systems (MEMS) accelerometers, the entire structure of the accelerometer, includes the mass, the springs, and the composite wafer. The composite waf...

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Bibliographic Details
Main Authors: Yurong He, Chaowei Si, Guowei Han, Yongmei Zhao, Jin Ning, Fuhua Yang
Format: Article
Language:English
Published: MDPI AG 2021-01-01
Series:Micromachines
Subjects:
MEMS
accelerometer
glass–silicon composite wafer
vertical signal extraction
miniaturization
Online Access:https://www.mdpi.com/2072-666X/12/2/102

Internet

https://www.mdpi.com/2072-666X/12/2/102

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