UV/Ozone-Treated and Sol–Gel-Processed Y<sub>2</sub>O<sub>3</sub> Insulators Prepared Using Gelation-Delaying Precursors

UV/Ozone-Treated and Sol–Gel-Processed Y<sub>2</sub>O<sub>3</sub> Insulators Prepared Using Gelation-Delaying Precursors

In this study, a Y<sub>2</sub>O<sub>3</sub> insulator was fabricated via the sol–gel process and the effect of precursors and annealing processes on its electrical performance was studied. Yttrium(III) acetate hydrate, yttrium(III) nitrate tetrahydrate, yttrium isopropoxide o...

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Bibliographic Details
Main Authors: Sangwoo Lee, Yoonjin Cho, Seongwon Heo, Jin-Hyuk Bae, In-Man Kang, Kwangeun Kim, Won-Yong Lee, Jaewon Jang
Format: Article
Language:English
Published: MDPI AG 2024-05-01
Series:Nanomaterials
Subjects:
sol–gel method
Y<sub>2</sub>O<sub>3</sub>
RRAM
gelation
UV/ozone
Online Access:https://www.mdpi.com/2079-4991/14/9/791

Internet

https://www.mdpi.com/2079-4991/14/9/791

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