CuO/PMMA Polymer Nanocomposites as Novel Resist Materials for E-Beam Lithography

Polymer nanocomposites have emerged as a new powerful class of materials because of their versatility, adaptability and wide applicability to a variety of fields. In this work, a facile and cost-effective method to develop poly(methyl methacrylate) (PMMA)-based polymer nanocomposites with copper oxi...

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Bibliographic Details
Main Authors: Georgia Geka, George Papageorgiou, Margarita Chatzichristidi, Andreas Germanos Karydas, Vassilis Psycharis, Eleni Makarona
Format: Article
Language:English
Published: MDPI AG 2021-03-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/3/762