Structural Design of Dual-Type Thin-Film Thermopiles and Their Heat Flow Sensitivity Performance
Aiming at the shortcomings of the traditional engineering experience in designing thin-film heat flow meters, such as low precision and long iteration time, the finite element analysis model of thin-film heat flow meters is established based on finite element simulation methods, and a double-type th...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/7/1458 |