The surface structure of polishing pads for polishing using composite abrasives

The surface structure of polishing pads for polishing using composite abrasives

Cerium oxide (CeO2) abrasives are generally used in the glass polishing because high removal rate and smooth glass surface can be obtained. However, CeO2 abrasives have problems with dispersion of slurry and cleaning from glass surface. The polymer-CeO2 composite abrasive was developed to improve po...

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Bibliographic Details
Main Authors: Naoaki ICHINOHO, Junji MURATA, Yasuhiro TANI, Yu ZHANG
Format: Article
Language:Japanese
Published: The Japan Society of Mechanical Engineers 2016-02-01
Series:Nihon Kikai Gakkai ronbunshu
Subjects:
cerium oxide
polishing
glass
removal rate
surface roughness
composite abrasives
Online Access:https://www.jstage.jst.go.jp/article/transjsme/82/835/82_15-00447/_pdf/-char/en

Internet

https://www.jstage.jst.go.jp/article/transjsme/82/835/82_15-00447/_pdf/-char/en

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