Microstructural Gradational Properties of Sn-Doped Gallium Oxide Heteroepitaxial Layers Grown Using Mist Chemical Vapor Deposition

Microstructural Gradational Properties of Sn-Doped Gallium Oxide Heteroepitaxial Layers Grown Using Mist Chemical Vapor Deposition

This study examined the microstructural gradation in Sn-doped, n-type Ga<sub>2</sub>O<sub>3</sub> epitaxial layers grown on a two-inch sapphire substrate using horizontal hot-wall mist chemical vapor deposition (mist CVD). The results revealed that, compared to a single Ga<...

Full description

Bibliographic Details
Main Authors: Kyoung-Ho Kim, Minh-Tan Ha, Heesoo Lee, Minho Kim, Okhyun Nam, Yun-Ji Shin, Seong-Min Jeong, Si-Young Bae
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Materials
Subjects:
Gallium oxide
mist CVD
doping
epitaxy
microstructural gradation
scattering
Online Access:https://www.mdpi.com/1996-1944/15/3/1050

Internet

https://www.mdpi.com/1996-1944/15/3/1050

Similar Items