High Precision Accelerometer with Integrated Thermal Sensor
This paper investigates the design of a Vibrating Beam Accelerometer (VBA) with a resolution of 50 nano-g combined with an integrated thermal sensor. Despite quartz intrinsic thermal stability, the time delay between vibrating beam’s temperature and package’s temperature gives way to unwanted transi...
Main Authors: | , , , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2017-08-01
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Series: | Proceedings |
Subjects: | |
Online Access: | https://www.mdpi.com/2504-3900/1/4/285 |